Abstract
The experiment has found that in order to form the thin film of certain compound by deposition, the same compound should be used for the target material. A stoichiometric mixture of components for forming the compound by solid reaction as the target material won't do the work. It seems that the particle emitted from the target remembers its initial state, the state when it is in the compound. By perturbation approximation, we estimated the life time of the initial state of the emitted particle, if the states of the particle are represented only by the states of outer shell electrons. To elucidate the experimental finding, other factors regarding the states of the emitted particle may have to take into consideration.
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