Abstract
We present a Fabry-Perot interferometer for microfluidic flow rate sensing. The FPI was composed by a pair of fiber Bragg grating reflectors and a micro Co 2+ -doped optical fiber cavity, acting as a “hot-wire” sensor. A microfluidic channel made from commercial silica capillary was integrated with the FPIs on a chip to realize flow-rate sensing system. By utilizing a tunable pump laser with wavelength of 1480 nm, the proposed flowmeter was experimentally demonstrated. The flow rate of the liquid sample is determined by the induced resonance wavelength shift of the FPI. The effect of the pump power on the performance of our flowmeter was investigated. The dynamic response was also measured under different flow-rate conditions. The experimental results achieve a sensitivity of 70 pm/(μL/s), a dynamic range up to 1.1 μL/s and response time in the level of seconds. Such good performance renders the sensor a promising supplementary component in microfluidic biochemical sensing system.
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