Abstract
In this paper, we report results from a computational investigation of the production and delivery of photons, ions, and radicals to surfaces using 2D fluid and electron Monte Carlo simulations. We record fluxes of ions and radicals to dielectric surfaces during a single discharge pulse of positive and negative polarity. We found that for a positive pulse, a surface ionization wave produces higher ion and radical fluxes as compared to a negative pulse. The disparity between the positive and negative surface waves increases when electron Monte Carlo simulation is used, which treats the energetic secondary electrons in a fully kinetic way.
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