Hot cathode ionization gauge calibration with the KRISS ultra-high vacuum standards

Abstract

The calibration system for ultra-high vacuum standards at the Korea Research Institute of Standards and Science (KRISS) uses a restriction in the range 5 × 10-7 Pa to 2 × 10-3 Pa. Using this system, we have calibrated for argon two commercially available gauges, an extractor gauge and a stabil-ion gauge. The correction factor of the extractor gauge in the lower pressure range was about 1.07 but it rose by 4%, reaching 1.11 at 2 × 10-5 Pa, while that of the stabil-ion gauge slowly decreased from 1.04 to 1.02 over four decades of the pressure range.