Abstract
The impact of time on the horizontal growth of carbon nanotubes with Fe catalyst is investigated at 600℃ for fabricating interconnects. The carbon nanotubes prepared using Fe catalyst was found to have small diameters, long lengths and high density. Resistivity of the horizontal carbon nanotube interconnect structures were found to be 2.79 Ω•cm. We also studied crosstalk using different lengths of multi-walled carbon nanotubes. Through the analysis of the basic parameters of carbon nanotubes, we establish a distribution model and a three-line structure of parallel multi-walled carbon nanotubes interconnects to analyze the impact of crosstalk between the interconnect line. Simulation was used to study the crosstalk behavior which was found to increase with respect to the length of the multi-walled carbon nanotubes and the crosstalk voltage decreased with the increase in radius. However, the thickness of the oxide layer or medium had little effect on the carbon nanotube interconnects.
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