Abstract
The possibility to record and reconstruct X-ray holograms of microobjects is investigated. The resolution of the image reconstructed from the hologram is shown to be able to be 100 Å in the lateral direction and 300 Å in depth in case that X-ray lithographic photoresists with inherent resolution 50 Å are used. The image can be reconstructed either by computing, or by optical reading from the magnified in SEM relief of a metallized replica. Denis'uk scheme of X-ray hologram recording is suggested to discriminate effectively between the real and virtual images. The results of the model experiment on the hologram recording and reconstruction from the metallized photoresist surface are presented.
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