Abstract
Two-photon polymerization enables the fabrication of micron sized structures with submicron resolution. Spatial light modulators (SLM) have already been used to create multiple polymerizing foci in the photoresist by holographic beam shaping, thus enabling the parallel fabrication of multiple microstructures. Here we demonstrate the parallel two-photon polymerization of single 3D microstructures by multiple holographically translated foci. Multiple foci were created by phase holograms, which were calculated real-time on an NVIDIA CUDA GPU, and displayed on an electronically addressed SLM. A 3D demonstrational structure was designed that is built up from a nested set of dodecahedron frames of decreasing size. Each individual microstructure was fabricated with the parallel and coordinated motion of 5 holographic foci. The reproducibility and the high uniformity of features of the microstructures were verified by scanning electron microscopy.
Highlights
Two-photon polymerization (TPP) is a widespread method to produce micron-sized structures with submicron resolution [1,2,3,4,5,6,7,8]
In this work we present two-photon polymerization of complex 3D microstructures, where
The holograms were calculated and displayed in real-time with the spatial light modulators (SLM)’ 60 Hz refresh rate, which resulted in 9 μm/s scanning speed and 9.15 s fabrication time
Summary
Two-photon polymerization (TPP) is a widespread method to produce micron-sized structures with submicron resolution [1,2,3,4,5,6,7,8]. With phase modulating liquid crystal SLMs it is possible to create and dynamically rearrange multiple focal spots in 3D by holographic beam shaping Such devices are the key elements of holographic optical tweezers, where they are used to create and move multiple optical traps in real-time [16]. This ability of an SLM has been used to demonstrate parallel single-photon polymerization of multiple identical microstructures by holographically created and translated focal spots [17]. TPP has not yet been presented in such a manner, as neither the parallel fabrication of a single three-dimensional structure with holographically translated multiple foci
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