Abstract
Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).
Highlights
Interest in three-dimensional (3D) maskless micro- and nano-processing of materials is fueled by the need of novel photonic crystal, plasmonic, near-field, and micro-fluidic devices for applications in various fields, like micro electro-mechanical systems (MEMS)
We have demonstrated a simple and versatile implementation of holographic lithography based on the diffractive beam-splitter (DBS) [3, 4], which allowed to obtain any number of coherent beams and achieve their perfect spatio-temporal overlap using a few optical elements
It can be shown using Eq (1) that recording of 2D interference patterns needs at least three laser beams converging at non-zero angles with respect to the main optical axis of the system (see Fig. 1 (a,b))
Summary
Interest in three-dimensional (3D) maskless micro- and nano-processing of materials is fueled by the need of novel photonic crystal, plasmonic, near-field, and micro-fluidic devices for applications in various fields, like micro electro-mechanical systems (MEMS). To ensure high fabrication throughput at low cost, fabrication methods natively suitable for 3D fabrication must be developed. In this respect one of the highly useful techniques is lithography in the bulk of photosensitive materials based on multiphoton exposure to the periodic patterns created by the interference of several coherent laser beams [1, 2, 3]. The interfering fields are obtained from a single laser beam, split into multiple components, and the method is similar to recording of holograms. The structures recorded by holographic lithography can be used as building elements of larger micro-fluidic systems, for example Brownian ratch-
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