Abstract
Parallel femtosecond laser processing using a hologram displayed on a spatial light modulator is demonstrated. The use of a spatial light modulator enables to perform an arbitrary and variable patterning. The hologram is multiplexed phase Fresnel lenses (MPFL) is demonstrated. The MPFL has the features of an independent tunablity and three-dimensional parallelism of the diffraction peaks with low computational costs. The MPFL is optimized by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of the spatial light modulator. Two-dimensional and three-dimensional parallel processing of glass are demonstrate and the processing performance is analyzed.
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