Holographic Fabrication of 3D Nanostructures

Abstract

AbstractIn this paper, the authors review the optical principles underlying the fabrication of 3D periodic nanostructures prepared using holographic lithography (HL) as well as their applications toward chemical sensors and energy storage devices using 3D functional nanomaterials. HL is potentially useful for the simple and rapid fabrication of defect‐free large‐area periodic nanostructures with various structural geometries. The use of optical elements, such as well‐designed prisms and diffraction gratings, improves the reproducibility of the manufacturing process by simplifying complicated optical setups. 3D functional nanostructures, including semiconductor and metallic nanomaterials, are useful in highly sensitive photonic crystals and plasmonic sensors, and high‐performance 3D electrodes for use in energy production and storage devices.