Abstract
We present hollow waveguide arrays acting like quarter- and half-wave plates. Approximately 2000 × 2500 individual rectangular hollow waveguides filled with air and surrounded by a gold cladding form the basis of the wave plates. The hollow waveguides fabricated by combining femtosecond 3D direct laser writing with electroplating have sub-micron dimensions of less than 500 nm in the cladding area. Both wave plates show the characteristic properties of quarter- and half-wave plates converting a linear polarized input field into a circular (quarter-wave plate) and a linear 180 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$^\circ$</tex-math></inline-formula> phase shifted polarized output field (half-wave plate). This is confirmed experimentally by measuring the angle-dependent phase shift, the Stokes vectors and polarization ellipses for both wave plates.
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