Abstract
The characteristics, performance, and design feature of a filamentless plasma-cathode electron gun for beam generation in the forepump gas pressure range are presented. The plasma cathode is based on a hollow-cathode direct current (dc) discharge. Using the method of “grid stabilization” it was possible to generate an e beam at a background gas pressure as high as about 10−1 Torr. This pressure can be easily obtained by using mechanical pump only. The operation of the gun with a magnetic field up to 0.1 T was investigated. The presence of a magnetic field (B field) is often required, for instance in plasma chemistry and surface treatment processes. The effect of the B field both on discharge and emission parameters of the gun are observed. The results obtained can be explained based on the concept of electron confinement and motion across the B field. With the accelerating voltage up to 8 kV, the gun is able to generate an electron beam of about 0.7 A dc.
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