Abstract

A new type of ion source with axial extraction, based on hollow-cathode magnetron discharge, has been developed. Constant hydrogen ion currents in excess of 1 mA with an exit source aperture of 1 mm in diameter and accelerating voltages up to 3 kV, have been extracted axially from the cylindrical hollow cathode. Similar results have been obtained with helium, argon, and nitrogen plasmas.

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