Abstract
A new type of ion source with axial extraction, based on hollow-cathode magnetron discharge, has been developed. Constant hydrogen ion currents in excess of 1 mA with an exit source aperture of 1 mm in diameter and accelerating voltages up to 3 kV, have been extracted axially from the cylindrical hollow cathode. Similar results have been obtained with helium, argon, and nitrogen plasmas.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.