Abstract

Characteristics of plasmas in a magnetron ion source with a hollow mesh cathode have been studied. It was found that depending on conditions of discharge and ion current in the cylindrical mesh cathode, the plasma column is always formed in such a way as to ensure necessary ion concentration for extracted ion current.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.