Abstract
Hollow atomic force microscope (AFM) cantilevers were used earlier to dispense liquids of sub 100nm diameter and inject reagents into one single cell. However, aspiration of liquid was never shown. In this work, we demonstrate pipetting (dispensing and aspiration) of liquid using hollow AFM cantilevers. The microfabricated 155μm long cantilever had a volume capacity of 2.64pL, with pipetting flow rate control of 5fL/s. This functionality enables to move liquid matter at nanoscale, do force-spectroscopy and imaging with the same AFM.
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