Holey carbon micro-arrays for transmission electron microscopy: A microcontact printing approach

Abstract

We have used a microcontact printing approach to produce high quality and inexpensive holey carbon micro-arrays. Fabrication involves: (1) micromolding a poly(dimethylsiloxane) (PDMS) elastomer stamp from a microfabricated master that contains the desired array pattern; (2) using the PDMS stamp for microcontact printing a thin sacrificial plastic film that contains an array of holes; (3) floating the plastic film onto TEM grids; (4) evaporating carbon onto the plastic film and (5) removing the sacrificial plastic film. The final holey carbon micro-arrays are ready for use as support films in TEM applications with the fidelity of the original microfabricated pattern. This approach is cost effective as both the master and the stamps have long-term reusability. Arbitrary array patterns can be made with microfabricated masters made through a single-step photolithographic process.