Abstract

Density of states and group velocity for the valence bands of ${\mathrm{SiO}}_{2}$ are worked out as a function of energy. The purpose is to provide reliable parameters for the calculation of hole transport within gate oxides, which is acquiring more relevance in view of the application to advanced MOS devices. It is shown that the applicability of the effective-mass concept to hole transport in ${\mathrm{SiO}}_{2}$ is much more restricted than in other materials.

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