Abstract
Current issues associated with laser-assisted atom probe tomography of insulators are addressed by investigating laser-induced carrier dynamics and field evaporation kinetics. It is shown that for typical insulators with slow carrier recombination compared to the sub-picosecond laser pulse, hole accumulation at the surface plays a key role. By carrying out density functional theory calculations on a MgO cluster, it is found that the critical evaporation field strength decreases linearly as the surface hole density increases. This phenomenon can be explained by the hole-induced electric field. The evaporation of neutral oxygen is enhanced at low electrostatic field strength and high laser intensity. Theoretical insight is also provided for the non-stoichiometry problem in the mass spectra measured in atom probe tomography of compounds.
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