Abstract
The Helmholtz Nano Facility (HNF) is a state-of-the-art cleanroom facility. The cleanroom has ~1100 m2 with cleanroom classes of DIN ISO 1-3. HNF operates according to VDI DIN 2083, Good Manufacturing Practice (GMP) and aquivalent to Semiconductor Industry Association (SIA) standards. HNF is a user facility of Forschungszentrum Jülich and comprises a network of facilities, processes and systems for research, production and characterization of micro- and nanostructures. HNF meets the basic supply of micro- and nanostructures for nanoelectronics, fluidics. micromechanics, biology, neutron and energy science, etc..The task of HNF is rapid progress in nanostructures and their technology, offering efficient access to infrastructure and equipment. HNF gives access to expertise and provides resources in production, synthesis, characterization and integration of structures, devices and circuits. HNF covers the range from basic research to application oriented research facilitating a broad variety of different materials and different sample sizes.
Highlights
The technology platform of Helmholtz Nano Facility (HNF) provides a wide range of standard planar technologies: 2.1 Pattern De nition: For pattern de nition Electron-Beam-Lithography, Nanoimprint-Lithography and optical Lithography are used: Type
The HNF O ce implements the recommendations of the HNF steering committee
The technology platform of HNF provides a wide range of standard planar technologies: 2.1 Pattern De nition: For pattern de nition Electron-Beam-Lithography, Nanoimprint-Lithography and optical Lithography are used: Type
Summary
HNF is a user facility according to HGF infrastructures and proposal based. Safety management and tool booking is done via a professional web based managing platform. This is a combination of web presence (www.hnf.fz-juelich.de). HNF is organized by the HNF O ce. It is the rst contact for users in scienti c and technical matters. HNF O ce organizes the application process, the acceptance of applications for scienti c projects and the assessment of their scienti c and technical feasibility. The HNF O ce implements the recommendations of the HNF steering committee.
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