Abstract
White-light scanning interferometry is an effective and widely used technology for measuring the microscopic three-dimensional morphology of an object. However, it is easily affected by external disturbances and appears to have a non-uniform sampling problem, which reduces the measurement accuracy. In this study, an effective correction algorithm is presented, in which a Hilbert transform and a correlation analysis of the white light interference envelope curves, as well as the simulated ideal interference signal envelope, are employed for a robust and high precision signal correction. In addition, the proposed method is at least 4 times as accurate as a traditional method and achieves a high repeatability, which is analyzed through a simulation and contrast experiments.
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