High‐voltage EDMOS transistor with dual work function gate

Abstract

A high-voltage extended drain MOS (EDMOS) transistor with a dual work function gate (DWFG) is discussed. This device enhances device performance by modifying the electric field in the channel. For DWFG EDMOS device fabrication, the polycrystalline silicon gates on the source and drain sides are doped by p + and n + ion implantation, respectively. Experimental results from the fabricated DWFG EDMOS devices show improved transconductance (g m), drain conductance (g ds) and specific on-resistance (R ON) characteristics without breakdown voltage reduction.