Abstract

High-temperature vibration sensors are needed for precise monitoring of dynamic mechanical conditions in aerospace, automotive, and energy-generation-related systems. In this article, a compression-mode vibration sensor was designed and fabricated using a Ba <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> TiSi <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">8</sub> single crystal for structural health monitoring at elevated temperatures (650 °C). The fundamental performance of the sensor was simulated, and the effect of pretightening torques on sensor performance was studied. Sensor performance was characterized as a function of temperature up to 650 °C in a frequency range of 100—600 Hz. The sensitivity of the sensor was found to be on the order of 2.6–2.7 pC/g over the tested frequency and temperature ranges, with variation below 2%. In addition, the sensor was found to maintain ultrastable sensitivity at 650 °C. Thus, it exhibits good sensing capability and high reliability at elevated temperatures.

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