Abstract
In this letter, we propose a high-speed charging method using vacuum ultraviolet (vuv) irradiation, which can increase the charging rate by two orders of magnitudes than corona/soft-x-ray charging methods. So far, vuv has been used for neutralization of electrostatic charge in semiconductor process. However, the large ion current obtained with the VUV irradiation has never been used for charging electrets.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
