Abstract
The two-dimensional layered semiconducting tungsten disulfide (WS2) film exhibits great promising prospects in the photoelectrical applications because of its unique photoelectrical conversion property. Herein, in this paper, we report the simple and scalable fabrication of homogeneous, large-size and transferable WS2 films with tens-of-nanometers thickness through magnetron sputtering and post annealing process. The produced WS2 films with low resistance (4.2 kΩ) are used to fabricate broadband sensitive photodetectors in the ultraviolet to visible region. The photodetectors exhibit excellent photoresponse properties, with a high responsivity of 53.3 A/W and a high detectivity of 1.22 × 1011 Jones at 365 nm. The strategy reported paves new way towards the large scale growth of transferable high quality, uniform WS2 films for various important applications including high performance photodetectors, solar cell, photoelectrochemical cell and so on.
Highlights
IntroductionPreparation of uniform large area WS2 thin film is the most fundamental step for various device fabrications
WS2 films on quartz substrate were produced by magnetron sputtering followed by post annealing
The post annealing process was carried out to enhance the crystallinity of the WS2 film
Summary
Preparation of uniform large area WS2 thin film is the most fundamental step for various device fabrications. As for the preparation of polycrystalline TMD films, the magnetron sputtering deposition method has proved to be better than the CVD method because of its simplicity, low cost, high production speed and scalability. A facial and scalable magnetron sputtering method was employed to fabricate the transferable continuous centimeter sized polycrystalline WS2 film with thickness of ~25.2 nm, which is used to produce high performance UV-Vis photodetectors, showing excellent photo-response properties from the ultraviolet to www.nature.com/scientificreports/. It is expected that this transferable high quality large-area WS2 films has great potential applications in photodetectors and other photoelectrical functional devices
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