High-resolution printing of functional microdots by double-pulse laser-induced forward transfer

Abstract

For high-resolution printing, we have developed a novel way of functional microdots deposition based on laser-induced forward transfer, which is referred to laser-induced dot transfer (LIDT). LIDT is one of promising additive manufacturing techniques because it can realize flexible patterning of micron and submicron-sized dots at atmospheric room-temperature conditions. Recently we have achieved printing of functional oxide microdots by a double-pulse LIDT with the first pulse for preheat and the second pulse for transfer, resulting in more precise control of laser-induced hightemperature and thermal-stress in a source film. In this paper, temporal temperature distributions during the transfer process have been investigated using a finite element method approach. High-resolution printing of functional microdots is promising for future optoelectronic integrations.