High-resolution ion luminescence analysis with external proton microbeam probe

Abstract

Multiwavelength optics was improved to create a high-resolution ion luminescence (IL) spectroscopy system. An electrically cooled back-thinned CCD array with an effective wavelength range from 200 nm to 980 nm was used for the IL detector. The spectra of IL were acquired during microbeam irradiation of targets with 3 MeV H+ ions. The IL spectroscopy system provides IL spectra with a wavelength resolution of approximately 2 nm. IL spectroscopy was combined with in-air micro-particle-induced X-ray emission (micro-PIXE) at a beam current of approximately 100 pA, and a specific analysis allows us to determine the chemical composition of the target. Compared with the conventional wavelength-dispersive IL systems, the proposed IL spectroscopy system is more sensitive to IL, making it possible to observe the changes in spectra that correspond to changes in the chemical state of the elements inside the target.