Abstract
The last decade has brought major advances in electron beam induced microanalytical capabilities, particularly with the utilization of energy loss electrons. These developments have been predicated primarily by the design and by the more ready commercial availabilty of better magnetic spectrometers, both for scanning transmission and fixed-beam transmission electron microscopy.Theoretical and experimental investigation of spatial resolution or localization possible for microanalysis and elemental mapping has indicated a potential of about 0.5 nm at an energy loss close to 100 eV, improving slowly with increasing energy loss. At lower energy loss the spatial resolution worsens due to an expected increase in impact parameter, but is still anticipated to be of the order of 1 nm at a 10 eV loss.Coupled with high spatial resolution is an experimentally observed very high sensitivity of detection and identification of a very small number of atoms at high concentration.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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