Abstract
We demonstrate high-throughput, maskless patterning of biomolecules over centimeter scale areas with a diffraction-unlimited, sub-0.5 µm resolution using beam pen lithography (BPL), a technique employing a massively parallel array of near-field scanning probes. By integrating a digital micromirror device into the light path and aligning the grid of micromirrors to the grid of probes, we achieve independent actuation of >50,000 probes, enabling arbitrary patterning with high uniformity over the entire projection area.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
