Abstract
Using a newly developed pulsed dc sputtering source with unbalanced magnetrons, we deposited advanced inorganic functional thin films such as TiO2, TiN, and TiO2∕TiN∕TiO2 on glass at 200°C at rates 3 to 4 times greater than those deposited by conventional dc sputtering. The TiO2(101) and TiN(100) thin films were stoichiometric and polycrystalline but highly oriented. The TiO2 films showed high transmittances (90%) in the visible range. The TiN films showed very high reflectances (70%) in the infrared region. However, both transmittance and reflectance are strongly influenced by the thickness and surface roughness. Multilayer films of TiO2∕TiN∕TiO2 were also deposited on glass, and exhibited good optical properties. The best transmittances (85%) and reflectances (80%) were obtained with a thin film with TiO2(370nm)∕TiN(22nm)∕TiO2(450nm)∕glass structure. The high IR reflectance suggests the as-grown multilayer film can be used as a heat mirror.
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