High-quality Y-Ba-Cu-O thin films by PLD-ready for market applications

Abstract

Large-area pulsed laser deposition (PLD) has reached a state in terms of film quality and reproducibility which makes possible now real market applications of PLD-YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (YBCO) thin films on both sides of R-plane sapphire substrates as HTSC devices in satellite and mobile communication systems. Bandpass filters optimized from PLD-YBCO thin films presently fulfil the requirements of the main national companies which are active in future communication techniques. A relatively simple PLD arrangement with fixed laser plume and rotating substrate, with an offset between the laser plume and the center of the substrate is employed to deposit laterally homogeneous 3-inch diameter Ag-doped YBCO thin films. With the experience of more than 1,000 double-sided 3-inch diam. films a high degree of homogeneity and reproducibility of j/sub c/ and R/sub s/ is reached. The extension up to 8-inch substrate diameter will increase the productivity of the flexible PLD technique considerably.