High-quality VO2 films synthesized on polymer substrates using room-temperature pulsed laser deposition and annealing

Abstract

With the growing trend towards portable and adaptable devices in various fields, the demand for flexible electronics and coatings utilizing phase transition materials like VO2 as a functional layer is rising. However, depositing high-quality crystalline VO2 films directly onto polymer substrates remains challenging due to the thermosensitivity of such materials being barely compatible with usual VO2 deposition methods. In this study, we present a simple method for directly growing VO2 on Kapton substrates. VOx films were first deposited onto the Kapton substrate at room temperature using pulsed laser deposition and subsequently annealed in an oxygen atmosphere at 390 °C. The electrical and optical properties of the VO2/Kapton samples with different film thicknesses were investigated. The 200 nm-thick vanadium dioxide films exhibit the best resistivity contrast with 3.1 orders of magnitude (OOM), while the 50 nm-thick films show the best transmittance change of 54 % at 2500 nm. The switching performances are comparable or even superior to those achieved previously using more complicated synthesis processes such as film transfer, introduction of buffer layers, and ink injection. Additionally, by coupling W elemental doping and thin film strain, we successfully tuned the VO2 transition temperature to room temperature with a dopant concentration of only 1.1 at.% while maintaining a high electrical contrast (2 OOM). The impressive electrical and optical transition performance of the VO2/Kapton samples, combined with their tunable transition temperature, makes them promising candidates for flexible electronic devices and thermochromic smart coatings.