Abstract
Ferrite and air-core planar inductor arrays were fabricated on 4 inch Si wafer to characterize inductor performance. Three micron thick Ni0.5Zn0.5Fe2O4 film was deposited by a low temperature electrophoresis ferrite deposition process. All ferrite inductors in the array showed 35% higher inductance (L) and 130% higher quality factor (Q) than air-core inductor. The maximum Q of ferrite inductor was found to be 53 at 2 MHz. The superimposed DC current and the rated power were measured to be about 3 A and 15 W, respectively, for a 5% drop in L. The fabricated ferrite inductor has a higher current capability than the air-core inductor. In addition, the power efficiency of the buck DC-DC converter was predicted to be 94.3% at 1.93 W.
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