Abstract
We present the design, fabrication, and the characterization of a high-qualityfactor (Q) and high-sensitivity photonic crystal (PhC) cavity sensor on the silicon-on-insulator platform. By optimizing the structure of the PhC cavity, most of the light can be distributed in the lower index region; thus, the sensitivity can be dramatically improved. The transmission spectrum of the PhC cavity sensor is measured by immersing the device into a sodium chloride (NaCl) solution of different mass concentrations. A Q factor of 1.3 × 10 4 and a very high sensitivity of 428 nm/RIU have been experimentally demonstrated. Furthermore, the total size for the sensing part of the PhC cavity sensor is only 14.5 × 0.75 μm 2 .
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