Abstract
A photoconductive semiconductor switch (PCSS) fabricated from high-purity semi-insulating (HPSI) 4H-SiC is presented. This switch shows improvement over similar designs based on 6H-SiC due to higher carrier mobility and longer carrier lifetimes. Using a novel micropipe identification method, vertical PCSS devices have been fabricated from c-plane wafers that lead to higher hold-off voltage and decreased on-state resistance as compared to a lateral geometry. Operation of the photo switch in both on- and off-state is demonstrated and material characterization via microwave photoconductance decay (MPCD) is given.
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