High-precision three-dimensional coordinate measurement with subwavelength-aperture-fiber point diffraction interferometer

Abstract

To overcome the accuracy limitation due to the machining error of standard parts in measurement system, a threedimensional coordinate measurement method with subwavelength-aperture-fiber point diffraction interferometer (PDI) is proposed, in which the high-precision measurement standard is obtained from the ideal point-diffracted spherical wavefront instead of standard components. On the basis of the phase distribution demodulated from point-diffraction interference field, high-precision three-dimensional coordinate measurement is realized with numerical iteration optimization algorithm. The subwavelength-aperture fiber is used as point-diffraction source to get precise and highenergy spherical wavefront within high aperture angle range, by which the conflict between diffraction wave angle and energy in traditional PDI can be avoided. Besides, a double-iterative method based on Levenbery-Marquardt algorithm is proposed to realize precise reconstruct three-dimensional coordinate. The analysis shows that the proposed method can reach the measurement precision better than microns within a 200×200×300 (in unit of mm) working volume. This measurement method does not rely on the initial iteration value in numerical coordinate reconstruction, and also has high measurement precision, large measuring range, fast processing speed and preferable anti-noise ability. It is of great practicality for measurement of three-dimensional coordinate and calibration of measurement system.