Abstract
A multistage self-aligned quadrupole correction lens, which consists of two lens casings, is developed. Each lens-casing cylinder consists of three quadrupole and two aperture electrodes. All lens components in lens-casing cylinders are fabricated to achieve an electrode alignment accuracy better than 1 µm. Azimuth errors between entrance and exit lens-casing cylinders can be corrected using the rotary flange fastened to the entrance lens-casing cylinder. The correction-lens system is installed as the probe-forming objective lens in place of the rotationally symmetrical objective lens of the focused ion-beam system. Simulation results show that a four-stage quadrupole correction lens is useful as a correctable probe-forming objective lens because all aperture aberration coefficients can be effectively corrected under the condition of relatively low chromatic aberration. Probe-forming properties and beam shape affected by aperture aberrations of the four-stage quadrupole correction-lens system are observed by scanning ion microscope images.
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