Abstract
We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.
Highlights
Pursuing a photonic integrated circuit (PIC) has been taking place in the past few decades. inspired by the enormous success of electronic integration [1,2]
To produce single-mode lithium niobate on an insulator (LNOI) waveguides for both the TE and the TM mode, Ta2O5 of ultralow loss [22] was deposited onto the fabricated sample by electron-beam evaporation
To produce single-mode LNOI waveguides for both the TE and the TM mode, Ta2O52o0f1u9,l1tr0a, xlow loss [22] was deposited onto the fabricated sample by electron-beam evapor4atoiof n8
Summary
Pursuing a photonic integrated circuit (PIC) has been taking place in the past few decades. inspired by the enormous success of electronic integration [1,2]. Major requirements for waveguides are low optical loss, and high tunability and nonlinearity. As an important platform for PICs, silicon-based optical waveguides provide high field confinement [3].
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