Abstract

Very high power continuous-wave quantum cascade lasers are demonstrated in the mid-infrared (3 - 6 μm) wavelength range. λ~6 μm high-reflectivity coated QCLs are demonstrated producing over 370 mW continuous-wave power at room temperature with continuous-wave operation up to 333 K. Advanced heterostructure geometries, including the use of a thick electroplated gold, epilayer-side heat sink and a buried-ridge heterostructure are demonstrated to improve laser performance significantly when combined with narrow laser ridges. Recent significant improvements in CW operation are presented and include the development if narrow (9 μm-wide) ridges for high temperature CW operation. GasMBE growth of the strain-balanced λ~6 μm QCL heterostructure is discussed. X-ray diffraction measurements are presented and compared to computer simulations that indicate excellent layer and compositional uniformity of the structure.

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