Abstract
A high-performance transfer printing method using a new soluble tape which can be dissolved in acetone is proposed to be used in heterogeneous integration. Si inks array was transferred from SOI wafers onto various substrates without adhesion promoter by this new method which we refer to as the acetone soluble tape (AST) method to compare with other transfer printing methods by using thermal release tape (TRT), water soluble tape (WST) and polydimethylsiloxane (PDMS). By using the AST method, the transfer printing process does not involve interface contention between stamp/inks and inks/receiver substrate so that it maximizes the transfer printing efficiency. Experimental results present the AST method has good performances, and various alien substrates, even curvilinear surfaces, can be selected as receiver substrates by the AST method. To examine the quality of the transferred Si inks, the Si TFTs were fabricated by using the Si membrane transferred by the AST method on sapphire substrate and the devices show the good performance. All the results confirm that the AST method is an effective method in heterogeneous integration.
Highlights
There is growing interest in heterogeneous integration
We explored a simple, low-cost, high-performance transfer printing method, namely, acetone soluble tape (AST) transfer printing method which can transfer printing inks without adhesion promoter
A new transfer printing method which can be used in heterogeneous integration field was discovered by using AST
Summary
There is growing interest in heterogeneous integration. Integrating different materials on one single chip to fabricate different devices (e.g. GaN and Ga2O3 can be used to fabricate power devices, GaAs can be used to fabricate high-frequency devices, and Si can be used to fabricate digital control circuitry) is a key means to increase the integration scale and functional diversity of chip[1,2]. Some efforts were reported including modifying the surface of PDMS to increase the adhesion switching ratio[16,17] and changing the operation method of transfer printing[18,19]. These improvements were proved to be effective to increase the transfer printing efficiency. The liner of AST is inelastic so that it can maintain the exact arrangement of inks to realize high fidelity By this method, inks can be transferred on variety of substrates. Inks can be transferred and printed on curvilinear surfaces by transfer printing using AST It can be used in heterogeneous integration. What’s more, it is an effective way to continue Moore’s law
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