High-Order Vector Bessel-Gauss Beams for Laser Micromachining of Transparent Materials

Abstract

Here, we present thorough research into high-order vector Bessel-Gauss beams from a theoretical perspective, with experimental realization and application to transparent-material laser micromachining. Efficient, stable, high-quality, and power-vector Bessel-Gauss beam generation using two geometric-phase-based optical elements, a high-order $S$-wave plate and an axicon in combination with simple optical elements, such as lenses, wave plates, and polarizers, is demonstrated. Ultrashort pulse-vector Bessel-Gauss beams are used to induce modifications in the glass, creating three-dimensional tubular structures of type I and type II modification in D263T glass. Furthermore, samples containing tubular modifications are tested for etch selectivity in the femtosecond-laser-induced chemical-etching method with KOH solution by etching throughout channels.