Abstract

High precision optical components with large numerical aperture are widely used in industrial products. The stitching interferometry system was designed to measure high-numerical-aperture sphericity and extended the measurement range of interferometry. Firstly, sub-aperture stitching model and experimental system were analyzed. Adjustment mechanism with seven degrees of freedom was built to keep spherical surface in the null position. Then, optical path difference caused by adjustment errors was described by mathematical model. The misalignment aberrations in measurement result were removed after fitted by the Zernike polynomial and the accurate surface shape of single aperture is gained. Finally, a high-numerical-aperture sphericity was measured by the error homogenization algorithm. The PV and RMS are consistent with the results of full aperture testing.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.