Highly-detective tunable band-selective photodetector based on RF sputtered amorphous SiC thin-film: Effect of sputtering power

Abstract

In this paper, a new high-performance tunable band-selective (UV-Visible) photodetector (PD) based on RF sputtered a-SiC active layer is demonstrated. SiC thin-films were deposited on glass substrate by RF magnetron sputtering method at different sputter power values ranging from 60 W to 120 W. The samples morphological, structural, optical and photodetection properties were investigated by carrying out XRD, SEM, EDS, UV-Vis spectroscopy and photoresponse measurements. It was revealed that the sputtering power could modulate the optical behavior of a-SiC alloy, tuning favorable visible absorbance at high sputter power. This phenomenon is correlated with the influence of the RF power on the SiC film structural properties and compositions. Interestingly, measurements showed that a-SiC PD elaborated at 60 W of RF power can detect UV radiation with a high responsivity of 138 mA/W, low noise effects, superior detectivity of 7.8 × 10 12 Jones, while maintaining the visible blindness property. On the other hand, the prepared device at high sputtering power exhibits extended photoresponse characteristics, yielding 426 mA/W and 77 mA/W of responsivity values over UV and visible ranges, respectively. Therefore, the present investigation can provide a new strategy for the design and fabrication of photodetector devices based on SiC platform with broadband and solar-blind adjustable sensing purposes according to the desired application. • A new tunable band-selective photodetector based on RF sputtered amorphous SiC alloy was developed. • The effect of sputtering power on the device characteristics was systematically studied. • Structural, Optical and electrical properties were investigated. • High responsivity and detectivity exceeding 138 mA/W and 7 × 10 12 Jones, respectively, are recorded.