Highly stable Mo/Al bilayer electrode for stretchable electronics

Abstract

Highly-stable molybdenum/aluminum (Mo/Al) bilayered electrodes have been demonstrated as promising candidates for use in stretchable electronics. The serpentine-shaped Mo/Al bilayer electrode is shown to be operable with up to 220% elongation and no significant change in resistance. In Al-only electrodes, Al penetrates into the polyimide (PI) because of its high chemical reactivity with PI. This issue can be overcome by inserting Mo underneath the Al layer, blocking the reaction between Al and PI and enabling the formation of robust and highly conductive stretchable electrodes. With the proposed bilayer electrodes, stretchable thin-film transistor arrays that can be operated even when elongated up to 220% are realized. The fabricated devices exhibit very stable device performance under highly stretched conditions.