Abstract
In this study, the growth of high density single-crystalline ZnO nanowires on patternedZnO:Ga/SiO2/Si templates was reported. We also adsorbed Au nanoparticles onto nanowiresurfaces and fabricated ZnO nanowire CO sensors. With 50 ppm COgas, it was found that we could enhance the device sensitivities at350 °C from 4.2% to 46.5% by the adsorption of Au nanoparticles. It was also found that measuredsensitivities were around 30%, 37%, 46.5% and 53% when concentration of the injected COgas was 5, 20, 50 and 100 ppm, respectively.
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