Abstract
The technologies of optical planar evanescent wave chemical and biochemical sensors require chemically resistant, high refractive index waveguide films having very good optical transmission properties. In this paper we present such two-compound SiOx:TiOy waveguide films fabricated by using the sol-gel method and the dip-coating technique. These films not only have high optical quality and low propagation losses but also an extremely high refractive index of >1.90 (λ = 632.8 nm). Further we demonstrate efficient and simple sensing structures, designed and fabricated based on these films. For this purpose, grating couplers with a period of Λ = 417 nm were fabricated on the interface between a waveguide film and cover using the single-step nanoimprint method. These sensing structures were tested as planar refractometers. The results of the theoretical analysis on the basis of which the structures were designed as well as results of their experimental characterization are presented in this work. Consequently, the relationship between parameters and the sensitivity of investigated sensing structures is discussed. As a result, the profitable properties of the designed grating coupler sensors are verified and excellent consistency between the results of the theoretical analysis and experimental results is achieved.
Highlights
Integrated optics applications have been developed since the late 1960s [1,2]
In this paper we present two-compound SiOx :TiOy single mode waveguide films
In this paper we present the application of these films for the design and fabrication of sensor structures based on grating couplers
Summary
Integrated optics applications have been developed since the late 1960s [1,2]. The application areas are predominantly focused on telecommunication and sensory systems. In both cases one deals with optical systems integrated on a single planar substrate, which are based on the same set of subcomponents and operate on the same physical principles. Grating couplers are among the fundamental integrated optics subcomponents for both these application areas. They are used for vertical light coupling to an integrated optical system from an external light source directly or via an optical fiber [3,4,5,6,7].
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
