Abstract
Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.
Highlights
Micro-Pirani vacuum sensors are of vital importance in vacuum pressure measurement in modern society
Scholars have committed to the development of high-performance micro-Pirani vacuum sensors that have a large dynamic vacuum pressure range, small size, and are complementary metal oxide semiconductor (CMOS) compatible
To improve sensitivity and reduce power consumption, a greater temperature coefficient has been obtained by taking advantage of series diodes, and larger temperature variation of the micro-Pirani vacuum sensor has been achieved by making optimizations to the sensor structure
Summary
Micro-Pirani vacuum sensors are of vital importance in vacuum pressure measurement in modern society. With the development of micromachining technology, various microelectromechanical systems (MEMS)-based micro-Pirani vacuum sensors with a complex structure and small size have been designed and fabricated [1,2,3]. In addition to large dynamic vacuum pressure range and small sensor size, much attention has been focused on sensitivity and power consumption due to the application of micro-Pirani vacuum sensors in portable measuring equipment. To improve sensitivity and reduce power consumption, a greater temperature coefficient has been obtained by taking advantage of series diodes, and larger temperature variation of the micro-Pirani vacuum sensor has been achieved by making optimizations to the sensor structure. Test results indicate that the presented series-diode-based micro-Pirani vacuum sensor displays high sensitivity and low power consumption and is a good candidate for vacuum pressure monitoring
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