Abstract
In this paper we report a highly sensitive capacitive pressure sensor and transducer, with ultra high capacitance values, based on branched carbon nanotubes on ultra thin silicon membranes. The presence of tree-like CNTs is believed to be responsible for high overlap between fingers which results in a significant capacitance change of the fabricated pressure sensor by applying pressure. Also, by applying an external voltage between fingers at one side of the ultra thin membrane an observable actuation was obtained. This actuation is sensed by a capacitive interdigital sensor at the other side of the same membrane.
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