Abstract

0.5 mol% Pt decorated SnO 2 (Pt-SnO 2 ), 0.5 mol% Pd decorated SnO 2 (Pd-SnO 2 ), 0.5 mol% Pt decorated WO 3 (Pt-WO 3 ), and 0.5 mol% Pd decorated WO 3 (Pd-WO 3 ) gas sensing films were fabricated by screen printing. Subsequently, SiO2 membrane was deposited in situ by CVD. The response of the sensing films to CO, NO, H 2 , and NO 2 were investigated. Pt-SnO 2 , Pd-SnO 2 , and Pt-WO 3 with SiO2 membrane deposited for 20 min (Pt-WO 3 -SiO 2 ) and Pd-WO 3 showed highly sensitive and selective to CO, NO, H 2 , and NO 2 at each optimal operating temperature respectively. Different enhancements of response to target gases might be associated to the combined effects of electronic, chemical sensitizations, and “support effect”. The highly sensitive and selective gas sensors in this paper can be integrated into a gas sensor array to fabricate an electronic nose for H 2 , CO, NO, and NO 2 detection.

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