Abstract
A novel complementary atom switch (CAS) embedded in Cu BEOL has been developed to realize low programming voltage of 2V and extremely high disturbance reliability of OFF-state (T 0.1 >10 years at 1V, 125°C). The decrement of solid-electrolyte density successfully reduces the programming voltage down to 2V. Two bipolar resistive-change elements such as atom switches are connected in series with opposite direction, in which the two OFF-state elements complementarily divide the voltage stress, greatly enlarging the OFF-state lifetime. The highly reliable, complementary atom switch is a promising device for energy efficient, Nonvolatile Programmable Logic (NPL).
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