Abstract
Highly precise measurement of depth in micro meter is very important in many fields. Many methods measuring depth for spherical objects have been proposed. However, few of them can measure the depth for plane objects, such as μLED, which has advantages in brightness, power consumption and response speed. The depth measurement is one of the key technology for the transfer printing of μLED. In this paper, we proposed a method measuring depth for μLED array using single camera. The proposed method was calibrated by a precision stage. The uncertainties, such as camera distortion, camera tilt, curve fitting and surface roughness of μLED were estimated. The results showed that the relative standard uncertainty in depth position was about 2.2%. This showed that the proposed system was very stable and repeatable.
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